Method for forming a thin-film lithium-ion battery

摘要

A method for forming a lithium-ion type battery including the steps of forming, over an at least locally conductive substrate, an insulating layer having a through opening; successively and conformally depositing a stack comprising a cathode collector layer, a cathode layer, an electrolyte layer, and an anode layer, this stack having a thickness smaller than the thickness of the insulating layer; forming, over the structure, an anode collector layer filling the space remaining in the opening; and planarizing the structure to expose the upper surface of the insulating layer.

主权项

1. A method for forming a battery comprising:
forming, over a substrate, an insulating layer comprising an opening; successively and conformally depositing a stack onto the insulating layer and the opening, the stack comprising a cathode collector layer, a cathode layer, an electrolyte layer, and an anode layer, the stack having a thickness within the opening that is smaller than a thickness of the insulating layer; and forming, over the stack, an anode collector layer in the opening.