Process for producing a quartz glass cylinder and also support for carrying out the process

摘要

In a known process for producing a quartz glass cylinder, a porous soot tube, which is sintered to form the quartz glass cylinder, is produced by depositing SiO2 particles on an outer cylindrical surface of a support, which rotates about the longitudinal axis thereof and has a layer of silicon carbide (SiC layer). In order on this basis to specify a support having a high resistance to fracture, which firstly can easily be removed and which secondly presents a low risk of contamination for the soot body, the invention proposes that the SiC layer is treated at a high temperature in an oxygen-containing atmosphere before the SiO2 particles are deposited, in such a manner that an SiO2 protective layer having a thickness of at least 0.1 μm is produced by oxidation.

主权项

1. A method for producing a quartz glass cylinder, said method comprising
producing a porous soot tube by depositing SiO2 particles on a cylinder jacket surface of a support rotating about a longitudinal axis thereof and having a SiC layer, and sintering the soot tube so as to form the quartz glass cylinder, and treating the SiC layer prior to deposition of the SiO2 particles at a high temperature in an oxygen-containing atmosphere such that a SiO2 barrier layer with a thickness of at least 0.1 μm is produced by oxidation.