| 主权项 |
1. An electronic device processing system, comprising:
a chamber; a robot apparatus received in the chamber and adapted to transport at least one substrate, the robot apparatus having a rigid cantilever boom linkage adapted to rotate about a rotational axis of the boom linkage and a first robot assembly and a second robot assembly, the boom linkage comprises:
first and second cantilever beams extending in two directions from the rotational axis of the boom linkage;the first robot assembly being mounted to the first cantilever beam, and the second robot assembly being mounted to the second cantilever beam, wherein a line extending between a shoulder axis of the first robot assembly and a shoulder axis of the second robot assembly is offset from the rotational axis of the boom linkage, the first robot assembly further including:
upper arms coupled to the boom linkage at a first radial position offset from a rotational axis of the boom linkage and adapted to be rotated in an X-Y plane relative to the boom linkage about a shoulder axis,forearms coupled to, and adapted for rotation relative to, the respective upper arms at respective elbow axes spaced from the shoulder axis,wrist members coupled to, and the respective forearms, adapted for rotation in an X-Y plane relative to the respective forearms at wrist axes spaced from the elbow axes to cause motion of the respective wrist members in opposing directions in a translational mode, andat least one end effector included on each wrist member of the respective wrist members, the at least one end effector adapted to carry the at least one substrate, wherein each wrist axis for each wrist member is positioned offset from the rotational axis of the boom linkage; and the robot apparatus being attached to a drive system with motor components located outside of the chamber; the drive assembly including
drive components adapted to rotate the boom linkage about the rotational axis of the boom linkage including a first motor component;drive components adapted to rotate the respective upper arms of the first robot assembly about the shoulder axis, each respective drive component including a drive shaft coupled to a drive pulley, a belt, and a driven pulley coupled to the respective upper arms by respective pilots and respective motor components, the drive components are configured such that rotation of the respective motor components causes rotation of the respective drive shaft and respective drive pulley and drives the respective driven pulley thereby rotating the respective pilots and the respective upper arms about the shoulder axis; anddrive components adapted to rotate the respective forearms about the respective elbow axes, including a second drive shaft coupled to a second drive pulley, a second belt, and a second driven pulley coupled to the respective forearms and the respective wrist members by a third shaft, configured such that rotation of a third motor component causes rotation of the second drive shaft and the second drive pulley and drives the second driven pulley thereby rotating the third shaft, which rotates the forearms about the respective elbow axis and the wrist members about the respective wrist axes such that the wrist members are capable of motion in opposing directions in the translational mode. |
