| 摘要 |
A remote plasma generator is disclosed. The remote plasma generator comprises: an external main body which is formed with first and second bodies that touch and are combined to each other and has a first annular groove formed on an inner circumferential surface; and an internal main body which is inserted inside the external main body, formed with third and fourth bodies that touch and are combined to each other, and has a second annular groove formed on an outer circumferential surface, wherein a torus-shaped passage is formed by connection of the first annular groove and the second annular groove, and cooling water circulation passages are formed in the first, second, third, and fourth bodies to enable cooling through circulation of cooling water. According to the present invention, since a chamber of the remote plasma generator is formed into a torus shape, etching generated inside the chamber can be solved, so, the durability is improved and the life can be lengthened. In addition, pollutants resulting from the etching can be basically excluded. Moreover, the heat built up by hot plasma can be cooled by circulation of the cooling water, whereby the remote plasma generator can discharge plasma at high power for a long time. |
