发明名称 SILICON SINGLE CRYSTAL INGOT GROWTH APPARATUS
摘要 An ingot growth apparatus of the present invention comprises a shaft lifting and rotating within a chamber; a wire lifting and rotating with the shaft and connected to a seed chuck; a socket holder combined to the lower part of the shaft and having a through-hole passing through a part of the wire; and a fastening ball mounted on the through-hole of the socket holder and connected to one end of the wire, wherein the fastening ball is mounted on a slope formed in the through-hole of the socket holder.
申请公布号 KR20140091328(A) 申请公布日期 2014.07.21
申请号 KR20130003475 申请日期 2013.01.11
申请人 LG SILTRON INCORPORATED 发明人 LEE, CHANG GYU;LEE, CHAN SIK;NA, GWANG HA
分类号 C30B15/00;C30B29/06;H01L21/02 主分类号 C30B15/00
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