发明名称 |
SILICON SINGLE CRYSTAL INGOT GROWTH APPARATUS |
摘要 |
An ingot growth apparatus of the present invention comprises a shaft lifting and rotating within a chamber; a wire lifting and rotating with the shaft and connected to a seed chuck; a socket holder combined to the lower part of the shaft and having a through-hole passing through a part of the wire; and a fastening ball mounted on the through-hole of the socket holder and connected to one end of the wire, wherein the fastening ball is mounted on a slope formed in the through-hole of the socket holder. |
申请公布号 |
KR20140091328(A) |
申请公布日期 |
2014.07.21 |
申请号 |
KR20130003475 |
申请日期 |
2013.01.11 |
申请人 |
LG SILTRON INCORPORATED |
发明人 |
LEE, CHANG GYU;LEE, CHAN SIK;NA, GWANG HA |
分类号 |
C30B15/00;C30B29/06;H01L21/02 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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