| 摘要 |
FIELD: chemistry.SUBSTANCE: device for ion-plasma application of multicomponent films in vacuum contains a working chamber, in which placed are: an anode, a cathode with a target, located on a base, a magnetic system, installed from the non-working side of the target, means for the target cooling and a substrate holder with a product. The device is additionally provided with two screening elements, located above working sides of the targets, installed with a possibility of regulation of their position relative to the target, with the substrate holder with the product being installed on the chamber case with a possibility of rotation around the target, and the anodes, the base and the substrate holder are electrically insulated from the chamber case and each other.EFFECT: homogeneity of coatings in optical thickness.1 dwg |
