| 摘要 |
PURPOSE: A moire fringe measurement system using an interferometer is provided to generate moire fringe by using a laser as a light source and using a prism optimizing the reflectance of a laser light source, thereby generating the moire fringe with excellent contrast. CONSTITUTION: A moire fringe measurement system using an interferometer includes a work stage (100), a first irradiation unit (200), a second irradiation unit (300), a sensing unit (400), and an image processing unit (500). A work piece (1) is seated on the upper portion of the work stage. The first irradiation unit is arranged on the upper portion of the work stage, and emits moire fringe on one surface of the work piece seated on the work piece. The second irradiation unit is arranged on the work stage, and emits straight line interference fringe on the other surface of the work piece seated on the work stage by arranged apart from the first irradiation unit. The sensing unit is arranged above the work stage and senses the deformed fringe emitted on the work piece. The image processing unit produces moire fringe by overlapping the reference straight line interference fringe which is sensed in a sensing unit and the deformed fringe which is sensed in the sensing unit. The straight line lattice fringe emitted by the first and second irradiation units is based on lasers (210,310) as a light source. [Reference numerals] (500) Image processing unit |
