| 摘要 |
The present invention relates to a coil of a scanning electron microscope. The coil of a scanning electron microscope according to one embodiment of the present invention includes a first coil (110), a second coil (120), and a third coil (130). According to the embodiment of the present invention, the first coil (110), the second coil (120), and the third coil (130) face each other. According to the embodiment of the present invention, the first coil (110) and the second coil (120) are vertically arranged. |
