发明名称 PROJECTION OBJECTIVE FOR LITHOGRAPHY
摘要 The projection lens (10) has an optical array of optical elements between an object plane (O) and an image plane (B). The optical array has two correction elements (K1,K2) for correcting aberration, by which corrective element is arranged optically in a closed pupil plane (P) and another corrective element is arranged in an area, which is optically closed neither in a pupil plane nor in a field plane.
申请公布号 KR101421298(B1) 申请公布日期 2014.07.18
申请号 KR20080007111 申请日期 2008.01.23
申请人 发明人
分类号 G02B3/00;G02B9/60;G02B13/00;G03F7/20 主分类号 G02B3/00
代理机构 代理人
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