发明名称 THIN FILM FIELD EFFECT TRANSISTOR AND DISPLAY USING THE SAME
摘要 A TFT is provided which includes, on a substrate, at least a gate electrode, a gate insulating layer, an active layer containing an amorphous oxide semiconductor, a source electrode, and a drain electrode, wherein a carrier concentration of the active layer is 3 × 10 17 cm -3 or more and a film thickness of the active layer is 0.5 nm or more and less than 10 nm. A TFT is provided which has a low OFF current and a high ON-OFF ratio, and is improved in environmental temperature dependency. Also, a display using the TFT is provided.
申请公布号 KR101421303(B1) 申请公布日期 2014.07.18
申请号 KR20080112960 申请日期 2008.11.13
申请人 发明人
分类号 G02F1/136;H01L29/786 主分类号 G02F1/136
代理机构 代理人
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