| 摘要 |
PROBLEM TO BE SOLVED: To provide a press device which can perform stable flattening of a top of a particle member with high accuracy and high load, and achieve a profiling function with high load by adding a fixation mechanism from the outside for unbalanced load resistance.SOLUTION: A lower press head includes profiling means which has: a lower member having a recessed spherical surface on its upper surface; an upper member having a projecting spherical surface fitted to the recessed spherical surface of the lower member on its lower surface; an air supply and suction mechanism supplying air to the space between the projecting spherical surface of the upper member and the recessed spherical surface of the lower member; and a fixation mechanism fixing the position of the upper member with respect to the lower member by pressing from outside of the upper member. In a state in which the projecting spherical surface of the upper member is fitted to the recessed spherical surface of the lower member and air is supplied to the space therebetween, an upper press head is lowered, and a flat surface of the upper surface of the upper member is pressed with a flat surface of a lower end of the upper press head to perform the parallelization between the upper press head and the lower press head. In the parallelization state, air is exhausted and sucked from the space between the recessed spherical surface and the projecting spherical surface to automatically fix the position of the upper member with respect to the lower member. Moreover, the recessed spherical surface has a reception area and thickness which can withstand a large vertical load. |
