SELF-TUNED DIELECTRIC BARRIER DISCHARGE

摘要

A plasma generating system. A pair of electrodes are spaced apart by an electrode gap. A source of a gas adapted to place the gas in the electrode gap. A power generating circuit is coupled to the electrodes to generate an electric field across the electrodes so as to initiate a plasma discharge within the electrode gap. The power generating circuit has adequate capacity to maintain a sufficient electric field across the gap during the plasma discharge to allow a plasma impedance to self-tune to the plasma generating system. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.

主权项

1. A method of generating a plasma discharge in a gas, the method comprising:
providing a plasma generating system comprising a pair of electrodes spaced apart by an electrode gap with a dielectric disposed in the electrode gap and with the electrodes being driven by a power generating circuit; allowing the gas to enter the electrode gap; initiating a plasma discharge in the gas within the electrode gap; and maintaining a sufficient electric field across the gap during the plasma discharge to allow a plasma impedance to self-tune to the plasma generating system.