| 发明名称 |
CHARGED PARTICLE BEAM WRITING METHOD |
| 摘要 |
A charged particle beam writing method comprising, an irradiation step of irradiating a sample with a charged particle beam emitted from a charged particle source, a first blanking step of performing the blanking while the charged particle beam is moved in a first direction from a position of the charged particle beam in the irradiation step; and a second blanking step of performing the blanking the charged particle beam is moved in a second direction opposite to the first direction from the position of the charged particle beam in the irradiation step. |
| 申请公布号 |
US2014197326(A1) |
申请公布日期 |
2014.07.17 |
| 申请号 |
US201414149478 |
申请日期 |
2014.01.07 |
| 申请人 |
NUFLARE TECHNOLOGY, INC. |
发明人 |
OHNISHI Takayuki |
| 分类号 |
H01J37/147;H01J37/317 |
主分类号 |
H01J37/147 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A charged particle beam writing method comprising:
an irradiation step of irradiating a sample with a charged particle beam emitted from a charged particle source; a first blanking step of performing the blanking while the charged particle beam is moved in a first direction from a position of the charged particle beam in the irradiation step; and a second blanking step of performing the blanking the charged particle beam is moved in a second direction opposite to the first direction from the position of the charged particle beam in the irradiation step. |
| 地址 |
Kanagawa JP |
