发明名称 |
REGION-OF-INTEREST DETERMINATION APPARATUS, OBSERVATION TOOL OR INSPECTION TOOL, REGION-OF-INTEREST DETERMINATION METHOD, AND OBSERVATION METHOD OR INSPECTION METHOD USING REGION-OF-INTEREST DETERMINATION METHOD |
摘要 |
The present invention aims at efficiently determining the partial regions to be inspected with high sensitivity and measured with high accuracy.;A region-of-interest determination apparatus includes: a calculation unit which calculates the incidence of a defect based on at least a plurality of kinds of defect attribute information regarding defect data, the defect data including an image corresponding to a defect position detected on a specimen by inspection thereof or an image corresponding to a defect position predicted to be likely to develop a defect on the specimen, both images being obtained by imaging; and a region determination unit which extracts the defect data of which the incidence is higher than a predetermined level, and determines the region to be observed or inspected on the specimen based on the extracted defect data. |
申请公布号 |
US2014198975(A1) |
申请公布日期 |
2014.07.17 |
申请号 |
US201214239653 |
申请日期 |
2012.07.09 |
申请人 |
Nakagaki Ryo;Hirai Takehiro;Obara Kenji |
发明人 |
Nakagaki Ryo;Hirai Takehiro;Obara Kenji |
分类号 |
G01N21/95 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
1. A region-of-interest determination apparatus comprising:
a calculation unit which calculates the incidence of a defect based on at least a plurality of kinds of defect attribute information regarding defect data, the defect data including an image corresponding to a defect position detected on a specimen by inspection thereof or an image corresponding to a defect position predicted to be likely to develop a defect on the specimen, both images being obtained by imaging; and a region determination unit which extracts the defect data of which said incidence is higher than a predetermined level, and determines the region to be observed or inspected on the specimen based on the extracted defect data. |
地址 |
Tokyo JP |