发明名称 ELECTRONIC DEVICE HAVING A PROJECTOR FUNCTION AND A VIBRATING MIRROR ELEMENT
摘要 A vibrating mirror device includes a mirror portion, a driving portion including a detecting electrode that detects an amount of deformation of a piezoelectric element when driving the mirror portion by applying a voltage to cause the piezoelectric element to deform, an insulating layer formed on a top face of the piezoelectric element, and a first lead interconnection that is formed on the top face of the insulating layer, that contacts the detecting electrode, and that extends to a region outside of the driving portion.
申请公布号 US2014198259(A1) 申请公布日期 2014.07.17
申请号 US201314132698 申请日期 2013.12.18
申请人 Funai Electric Co., Ltd. 发明人 Murayama Manabu;Kugo Kouichi;Inoue Naoki
分类号 G02B26/10;H04N9/31 主分类号 G02B26/10
代理机构 代理人
主权项 1. A vibrating mirror device comprising: a mirror portion; a driving portion including a detecting electrode that detects an amount of deformation of a piezoelectric element when driving the mirror portion by applying a voltage to cause the piezoelectric element to deform; an insulating layer formed on a top face of the piezoelectric element; and a first lead interconnection that is formed on the top face of the insulating layer, that contacts the detecting electrode, and that extends to a region outside of the driving portion.
地址 Osaka JP