| 摘要 |
A chamber having a diffuser is provided to facilitate the replacement and repair of a diffuser cover by coupling the diffuser cover with the fixing plate or the clamp between a gas line and the diffuser. A diffuser(130) supplies the gas to change the inside of the chamber from a vacuum state to an atmospheric pressure state. A filter diffuser cover(164) surrounds the diffuser. The diffuser includes a plurality of first holes spraying the gas. The filter diffuser cover includes a plurality of second holes identical to or larger than the first holes. The diffuser is connected to a gas line(146) inputted through a sidewall of the chamber. A fixing unit(148) fixes the gas line. The filter diffuser cover surrounding the diffuser has a cylinder shape. |
