MICROVALVE DEVICE AND MANUFACTURING METHOD THEREFOR

摘要

Disclosed are a microvalve device and a manufacturing method therefor. The microvalve device comprises a body, at least comprising a first layer (7) and one second layer (8) forming a chamber (9) together with the first layer (7), wherein the first layer (7) is provided with at least two fluid ports (4, 5, 6) which are in fluid communication with the chamber (9); and piezoelectric actuators (1, 2, 3) corresponding to the preset fluid ports (4, 5, 6), wherein the piezoelectric actuators (1, 2, 3) are arranged in the chamber (9) and the strain extending and retracting direction thereof is parallel to the first layer (7), with the free end of the piezoelectric actuators (1, 2, 3) in the strain extending and retracting direction being used for shielding the fluid ports (4, 5, 6) so as to control the opening/closing state of the fluid ports (4, 5, 6). The free end of the piezoelectric actuators (1, 2, 3) in the strain extending and retracting direction is directly used for shielding the fluid ports (4, 5, 6), and the purpose of directly controlling the fluid ports (4, 5, 6) is achieved by controlling the strain extending and retracting of the piezoelectric actuators (1, 2, 3).