| 摘要 |
The purpose of the present invention is to achieve an inspection device that is capable of precise calibration regardless of the usage environment and usage time. A reference substrate (100) on which a diffraction grating (107) is formed is mounted on a transport system (110); an illumination area (106), illuminated by light (105) from an illuminating optical system (104), is formed on the diffraction grating (107); reflected light is concentrated in a detecting optical system (108); and an output value is measured from a sensor (111). A determination is made whether the difference between a simulation value saved in a processing unit (112) and the output value from the sensor (111) is within a prescribed tolerance range, and then the optical systems are adjusted so that the same is within the tolerance range. An inspection device capable of precise calibration regardless of the usage environment and usage time can be achieved because the device is configured so that the reference data for calibrating the inspection device is obtained by using the diffraction grating. |
