Magnetron arrangement comprises support and target which is disposed on the support and has three boundary surfaces resting on the support

摘要

Magnetron arrangement (300) comprises: a support; and at least one target (302) disposed on the support. The target with three boundary surfaces rests on the support. An independent claim is also included for a target for a Magnetron arrangement, comprising three edge supporting surfaces for placing the target on a support, where three edge support surfaces are formed by a number of recesses.