FABRY-PEROT DEVICE WITH A MOVABLE MIRROR

摘要

A Fabry-Perot tunable filter (FPTF) includes a top mirror having a first surface for receiving light and a second surface opposite the first surface. A movable mirror having a front side is secured to the second surface of the top mirror and includes back side. The movable mirror includes an inner bend resistant portion, wherein the front side includes a flexible front side portion outside the inner bend resistant portion recessed relative to the inner bend resistant portion, and a front side outer bend resistant portion thicker than the flexible front side portion. The back side includes a flexible back side portion outside the inner bend resistant portion and a back side outer bend resistant portion thicker than the flexible back side portion. An actuator mechanically coupled to the back side of the movable mirror moves the inner bend resistant portion relative to the second surface of the top mirror.

主权项

1. A Fabry-Perot tunable filter (FPTF), comprising:
a top mirror having a first surface for receiving a light beam and a second surface opposite said first surface; a movable mirror having a front side secured to said second surface of said top mirror and a back side, said movable mirror including:
an inner bend resistant portion;said front side including a flexible front side portion outside said inner bend resistant portion recessed relative to said inner bend resistant portion, and a front side outer bend resistant portion thicker than said flexible front side portion outside said flexible front side portion,said back side including a flexible back side portion outside said inner bend resistant portion and a back side outer bend resistant portion thicker than said flexible back side portion outside said flexible back side portion, and an actuator mechanically coupled to said back side of said movable mirror for deforming or moving said inner bend resistant portion relative to said second surface of said top mirror.