发明名称 |
ELECTRIC FIELD DISCHARGE-TYPE ELECTRON SOURCE |
摘要 |
Increasing the volume or weight of zirconia which is a diffusion and supply source, to extend the life of a field-emission type electron source causes a problem that the diffusion and supply source itself or a tungsten needle is easily subjected to damage. As another problem, although it is considered to form the diffusion and supply source using a thin film to avoid the above-described problem, it is difficult to stably obtain practical life exceeding 8,000 hours. It has been found that practical life exceeding 8,000 hours is stably obtained by providing a field-emission type electron source that has no chips or cracks in a diffusion and supply source and that can extend life with a little bit of an increase in the amount of the diffusion and supply source. |
申请公布号 |
US2014197725(A1) |
申请公布日期 |
2014.07.17 |
申请号 |
US201214239144 |
申请日期 |
2012.09.24 |
申请人 |
Hitachi High-Technologies Corporation |
发明人 |
Katagiri Souichi;Ohshima Takashi;Ito Sukehiro |
分类号 |
H01J37/073 |
主分类号 |
H01J37/073 |
代理机构 |
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代理人 |
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主权项 |
1. A field-emission type electron source comprising: a needle obtained by sharpening one of tips of a rod-like single-crystal tungsten, and having zirconia formed to a predetermined thickness and a predetermined length on a side outer portion thereof as a diffusion and supply source, the one of the tips having a crystal plane (100); heating means for the needle; and a suppressor electrode, wherein
in the field-emission type electron source that allows electrons to be emitted by heating the needle to apply an electric field to the tip of the needle, when a length of the diffusion and supply source is L and a maximum thickness of the diffusion and supply source is t, t/L<3/50, and the thickness of the diffusion and supply source is in a range greater than or equal to 10 μm. |
地址 |
Minato-ku, Tokyo JP |