VIBRATION DAMPER FOR VACUUM PUMPS

摘要

In a vibration damper of a turbomolecular vacuum pump, a vacuum tightness function and a vibration damping function are both performed by one ore more toroidal rings made of an elastic material. The elastic rings assume a resting configuration while the vacuum pump is not operating and the damper is at atmospheric pressure, and they assume a compressed configuration while the vacuum pump is operating and the damper is under vacuum conditions. In the compressed configuration, the elastic rings are deformed due to a compression force. This deformation of the elastic rings prevents metal-to-metal contact between the vacuum pump and a vacuum chamber to which the pump is connected through the damper.

主权项

1. An apparatus, comprising:
a vibration damper comprising an elastic material and being arranged between a vacuum pump and a vacuum chamber, wherein the vibration damper assumes a resting configuration in response to a compression force with a magnitude lower than a predetermined threshold, and assumes a compressed configuration in response to a compression force with a magnitude greater than the predetermined threshold, the resting configuration forming an connection between the vacuum pump and the vacuum chamber, and the compressed configuration forming a vacuum-tight connection between the vacuum pump and the vacuum chamber and preventing contact between the vacuum pump and the vacuum chamber.