MIRROR MICROMECHANICAL STRUCTURE AND RELATED MANUFACTURING PROCESS

摘要

A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.

主权项

1. A mirror micromechanical structure, comprising:
a mobile mass which carries a mirror element and is configured to be driven in rotation for reflecting an incident light beam with a desired angular range (FOV); said mobile mass suspended above a cavity provided in a supporting body including semiconductor material, wherein said cavity is so shaped that said supporting body does not hinder the light beam reflected by said mirror element within said desired angular range (FOV).