| 摘要 |
Cell counting apparatus and cell counting method are provided. The cell counting apparatus comprises a reference electrode part formed on one side of a semiconductor substrate, a sensing dielectric layer, and a sensing part provided with a probe pattern formed on the sensing dielectric layer, and can reduce a ratio of capacitance change by reducing an effective area upon attaching target cells without shrinking an overall size of the sensing capacitor. Hence, a sensing sensitivity is enhanced so as to count the target cells accurately and easily by sensing the changes in a composite capacitance shown by the reference capacitor and the sensing capacitor at the moment that the target cells are captured. [Reference numerals] (AA) Cell sap indlow;(BB) Cell sap discharge |
