| 摘要 |
PROBLEM TO BE SOLVED: To provide a secondary particle detector for a charged particle beam system.SOLUTION: A secondary particle detector 302 comprises: a scintillator 304 arranged inside a vacuum chamber 107; and a transducer 312 such as a photomultiplier tube. Unlike an Everhart-Thomley detector of a conventional technology, the photomultiplier tube is arranged inside the vacuum chamber, and as a result, optical coupling is eliminated to improve detection and arrangement of a detector can have flexibility. |
