Digital Wireless Data Collection

摘要

The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The first and second sensors may communicate the parameters using different and incompatible protocols. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.

主权项

1. An apparatus comprising:
a micro-controller having an interface port coupled to a sensor, wherein the interface port is operable to obtain sensor data from the sensor according to a digital protocol, and wherein the micro-controller is operable to modulate the sensor data for wireless transmission; and a wireless transceiver coupled to the microcontroller, wherein the wireless transceiver is operable to:
receive the modulated sensor data from the microcontroller;wirelessly communicate the modulated sensor data to a computing system; andwirelessly receive a command to adjust operation of at least one of the sensor and an associated fabrication tool.