| 发明名称 |
Surface Profile Measurement System |
| 摘要 |
A profile measurement system includes a light source configured to generate light. A beam shaper configured to shape the light generated from the light source. A beam splitter configured to partially transmit and reflect the light shaped by the beam shaper. An object lens configured to receive the light from the beam splitter and irradiate the light to a stage in which a workpiece is mounted. A profile estimating part has a plurality of continuously varying focal points. The profile estimating part includes a focusing lens and a light detector configured to receive the light transmitted through the focusing lens. |
| 申请公布号 |
US2014198322(A1) |
申请公布日期 |
2014.07.17 |
| 申请号 |
US201314040098 |
申请日期 |
2013.09.27 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
Kim Kwang Soo;Lee Hyun-Jae;Ahn Myoung-Ki;Jeon Byeong-Hwan |
| 分类号 |
G01B11/24 |
主分类号 |
G01B11/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A profile measurement system, comprising:
a light source configured to generate light; a beam shaper configured to shape the light generated from the light source; a beam splitter configured to partially transmit and partially reflect the light shaped by the beam shaper; an object lens configured to receive the light from the beam splitter and focus the light to a stage in which a workpiece is mounted; and a profile estimating part having a plurality of continuously varying focal points, wherein the profile estimating part includes: a focusing lens; and a light detector configured to receive the light transmitted through the focusing lens. |
| 地址 |
SUWON-SI KR |
