发明名称 INSPECTION DEVICE AND INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an appearance inspection device and an appearance inspection method capable of performing appearance inspection even when positioning of an inspection object is not accurately performed.SOLUTION: An inspection device includes a storage unit that stores drawing data including a first mark, a capturing unit that captures image data of an inspection object corresponding to the drawing data and including a second mark, a correction unit that performs correction of the image data on the basis of the first mark and the second mark, and a comparing unit that performs comparison of images by using the drawing data stored in the storage unit and the image data corrected by the correction unit.
申请公布号 JP2014132229(A) 申请公布日期 2014.07.17
申请号 JP20130000233 申请日期 2013.01.04
申请人 FUJITSU ADVANCED ENGINEERING LTD 发明人 ASAO MASAHIRO
分类号 G01N21/956;G01B11/00 主分类号 G01N21/956
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