| 摘要 |
The present invention relates to a dresser device capable of intensively dressing a specific region of a polishing pad. In the dresser device for dressing the polishing pad while rotating between upper and lower surface plates, the present invention provides the dresser device comprising a ring-shaped main body in which sawteeth engaged with the upper and lower surface plates is formed on an outer circumference portion; and a plurality of moving segments which is installed to move in a direction of inner and outer circumferences of one surface of the main body. |
