发明名称 |
LASER PULSE ENERGY CONTROL SYSTEMS AND METHODS |
摘要 |
Systems and methods provide laser pulse energy control and/or monitoring. An example laser processing apparatus includes a laser system to generate a beam of laser pulses and a pulse energy control system to adjust the pulse energy of each laser pulse in the beam on a pulse-by-pulse basis. The pulse energy control system includes an open loop feedforward control path that selects a pulse energy transmission value for each laser pulse based on a calibrated transmission curve that maps laser pulse energy as a function of pulse repetition frequency. A laser energy monitor measures the laser pulse energy of each laser pulse in the beam of laser pulses. A power control loop may further adjust the pulse energy of one or more laser pulses in the beam of laser pulses based on feedback from the laser energy monitor. |
申请公布号 |
WO2014110276(A1) |
申请公布日期 |
2014.07.17 |
申请号 |
WO2014US10902 |
申请日期 |
2014.01.09 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
UNRATH, MARK A. |
分类号 |
B23K26/062;B23K26/03;B23K26/10 |
主分类号 |
B23K26/062 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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