METHOD OF MANUFACTURING BOLOMETER RESISTIVE FILM AND BOLOMETER, AND BOLOMETER AND IR DETECTOR MANUFACTURED BY THE SAME

摘要

The present invention relates to a method for manufacturing a resistive film for a bolometer, a method for manufacturing a bolometer, and an infrared ray detector and a bolometer manufactured by the same. The method for manufacturing a bolometer resistive film according to the present invention includes the steps of preparing a reacting solution by dissolving a chloride including a reactive metal; preparing an oxidized solution including an oxidizer and a pH buffer agent; forming a coating aqueous solution diluted by mixing the reacting solution and the oxidized solution using a deionized water; and depositing an oxide thin film on a substrate by a solution deposition method using the coating aqueous solution. By using the resistive film for a bolometer manufactured by the manufacturing method, it is possible to manufacture a bolometer having excellent precision and improved temperature stability within an operation temperature range together with a low specific resistivity, a high TCR value and low noise characteristics, and an infrared ray detector including the same.