| 摘要 |
PROBLEM TO BE SOLVED: To provide an industrial robot that has an arm which is arranged in a vacuum and whose internal space is partially placed under atmospheric pressure, and can reduce an operation error in fitting a seal member for securing airtightness of the internal space of the arm even when made large-sized.SOLUTION: In an industrial robot, an arm 14 is formed in a hollow shape having an internal space 45 surrounded with an upper surface part 85a, a lower surface part 85b, and a side face part 85c, and arranged in a vacuum, and the internal space 45 is placed under atmospheric pressure. The upper surface part 85a has a plurality of through holes 85g formed to communicate with the internal space 45, each through hole 85g is closed with a lid member 86, and a seal member is arranged between the upper surface part 85a and lid member 86. On a surface of the lower surface part 85b which is opposed to the upper surface part 85a, a plurality of recessed parts 85n are formed which at least overlap the through holes 85g when viewed from the direction of opposition between the upper surface part 85a and lower surface part 85b. |
