SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing system and a substrate processing program which can perform processing to suppress variations of chromaticity in a semiconductor light emitting device.SOLUTION: The substrate processing system has: a measurement section which measures information on a dimension to the surface of a wavelength conversion section from the placement surface of a holding fixture holding a substrate which has the wavelength conversion section including a light emitting section and a phosphor; a data processing section which acquires processing information on the thickness direction of the wavelength conversion section on the basis of the information on characteristics of the light emitted from the light emitting section and information on the dimension to the surface of the wavelength conversion section, from the placement surface of the holding fixture; and a processing section which processes the wavelength conversion section on the basis of the acquired processing information. The processing section is configured so as to process the wavelength conversion section by a tool with the edge of a blade using a single crystal diamond to reduce the thickness dimension in the wavelength conversion section of the substrate held by the holding fixture.