| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration-type angular velocity sensor whose detection sensitivity accuracy generated around an axis in a Z-axis direction is increased and whose detection sensitivity accuracy generated around axes in the X-axis direction and a Y-axis direction is not deteriorated.SOLUTION: A weight 3 has a columnar shape or a conical shape. The contour shape of the outer peripheral part of a diagram 1 has a shape having a straight portion ST at the four corners of a rectangle. Four vibrational excitation electrodes 11 are respectively formed within four regions partitioned by first and second virtual lines L1, L2. Four angular velocity detection electrodes 13 are respectively formed in four regions partitioned by a first virtual diagonal line CL1 and a second virtual diagonal line CL2. The corner parts of the contour shape of the four vibrational excitation electrodes 11 are each curved, and the corner parts of the contour shape of the four angular velocity detection electrodes 13 are each curved. |
