| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for growing carbon nanotubes which is free from aggregation of metal particles serving as a catalyst, and a method of manufacturing the same.SOLUTION: A substrate 1 for growing carbon nanotubes comprises a substrate 2, a catalyst 3, a form-defining material layer 4 in which the catalyst 3 is dispersedly arranged, and a coating layer 5 which is made of a metal oxide and covers the catalyst 3. A method of manufacturing the substrate 1 for growing carbon nanotubes comprises the steps of: sputtering a metal for forming the catalyst 3 onto the substrate 2 and oxidizing the surface of the metal; sputtering a form-defining material onto the substrate 2; and further sputtering the metal for forming the catalyst 3 onto the form-defining material and oxidizing the surface of the metal. |
