| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase impact resistance in an acceleration sensor used in attitude control of a movable body such as an airplane and a vehicle, position correction in a navigation system, motion detection of a portable terminal and a game machine, and the like.SOLUTION: An acceleration sensor 10 includes a fixing part 11, a beam part 12 one end of which is connected to the fixing part 11, and a weight part 13 connected to the other end of the beam part 12. The weight part 13 is composed of a thin-wall area 13a connected to the beam part 12 and a thick-wall area 13b connected to the thin-wall area 13a, and is configured such that a width of the thin-wall area 13a is larger than a width of the beam part 12 and a thickness of the thin-wall area 13a is smaller than a thickness of the thick-wall area 13b.</p> |
