| 发明名称 |
PASSIVE POSITION COMPENSATION OF A SPINDLE, STAGE, OR COMPONENT EXPOSED TO A HEAT LOAD |
| 摘要 |
<p>Disclosed herein is an apparatus for providing passive correction for thermal effects on a mounted mechanical component. Further disclosed is a wafer inspection system employing the passive thermal effect correction apparatus.</p> |
| 申请公布号 |
EP2754171(A2) |
申请公布日期 |
2014.07.16 |
| 申请号 |
EP20120830504 |
申请日期 |
2012.09.06 |
| 申请人 |
KLA-TENCOR CORPORATION |
发明人 |
DOYLE, PAUL;BELYAEV, ALEXANDER |
| 分类号 |
H01L21/687;G01N21/95;G02B7/00;H01L21/67 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
