| 摘要 |
PROBLEM TO BE SOLVED: To extend replacement cycle of a blanket by improving printing accuracy.SOLUTION: A plate table 5 and a substrate table 7 which have alignment stages 10 and 11, are provided on a guide rail 2 provided in a pedestal 1 so as to move thereon. A plate 4 and a substrate 6 are held thereon. A controller is provided for controlling the alignment stages 10 and 11 of the tables 5 and 7. In a transfer process for bringing a blanket roll 13 into contact with the plate 4, the alignment stage 10 of the plate table 5 is controlled so as to fix torque, a load applied to the plate 4 by the blanket roll 13 so as to displace it in horizontal and rotating directions is released by the operation of the alignment stage 10. In a retransfer process by bringing the blanket roll 13 into contact with the substrate 6, the alignment stage 11 of the substrate table 7 is subjected to position control so as to follow the operation generated in the alignment stage 10 of the plate table 5 during the transfer process. |
