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发明名称
快速远程等离子体原子层沉积装置
摘要
根据本发明的快速远程等离子体原子层沉积装置,包含有:向基板提供气体的源气单元;在上述基板产生等离子体的等离子体单元;及在向上述源气单元与上述等离子体单元之间提供的、吸入上述源气的气体吸入部;所提供的上述基板可沿着与上述源气单元、等离子体单元或是上述气体吸入部中至少一个水准方向的交叉方向相对运动。这种空间分割方式利用源气单元和等离子体单元,通过原子层沉积,从而确保快速的输送量。
申请公布号
TW201428131
申请公布日期
2014.07.16
申请号
TW103101238
申请日期
2014.01.14
申请人
汉阳大学校产学协力团
发明人
全蓥卓;崔鹤永
分类号
C23C16/455(2006.01)
主分类号
C23C16/455(2006.01)
代理机构
代理人
洪澄文
主权项
地址
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY 南韩
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