| 摘要 |
PROBLEM TO BE SOLVED: To achieve efficient resin sealing using a plurality of molds without impairing the advantages such as compactness and cost reduction produced by taking a vacuum pump used as combination use. SOLUTION: According to a resin sealing method, molds 118, 120 are provided, and the respective molds 118, 120 are subjected to decompression to achieve resin sealing. Before the completion of resin sealing operation for the mold 118, which is a preceding mold earlier subject to resin sealing operation between the molds 118, 120, the resin sealing operation for the mold 120 which is a following mold subject to resin sealing operation next to the mold 118, is started, and also the decompression period of the mold 118 and the decompression period of the mold 120 do not overlap each other. COPYRIGHT: (C)2010,JPO&INPIT |
