发明名称 CRYSTAL LAMINATE STRUCTURE AND METHOD FOR PRODUCING SAME
摘要 Provided are: a crystal laminate structure, in which crystals can be epitaxially grown on a ²-Ga 2 O 3 -based substrate with high efficiency to produce a high-quality ²-Ga 2 O 3 -based crystal film on the substrate; and a method for producing the crystal laminate structure. Provided is a crystal laminate structure (2) comprising: a ²-Ga 2 O 3 -based substrate (1), of which the major face (10) is a face that is rotated by 50 to 90° inclusive with respect to face (100); and a ²-Ga 2 O 3 -based crystal film (2) which is formed by the epitaxial crystal growth on the major face (10) of the ²-Ga 2 O 3 -based substrate (1).
申请公布号 EP2754736(A1) 申请公布日期 2014.07.16
申请号 EP20120829563 申请日期 2012.08.02
申请人 TAMURA CORPORATION 发明人 SASAKI, KOHEI
分类号 H01L21/363;C30B23/02;C30B29/16;H01L29/04;H01L29/24;H01L29/66;H01L29/778;H01L29/812;H01L29/872 主分类号 H01L21/363
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