| 发明名称 |
APPARATUS AND METHOD FOR REDUCING DARK CURRENT IN IMAGE SENSORS |
| 摘要 |
<p>A method for reducing dark current from an image sensor comprises a step of providing an image sensor wafer of backlight; a step of depositing a first protection layer on the back side of the image sensor wafer of the backlight; a step of depositing a protection layer for plasma improvement on the first protection layer; and a step of depositing a second protection layer on the protection layer for plasma improvement.</p> |
| 申请公布号 |
KR101420503(B1) |
申请公布日期 |
2014.07.16 |
| 申请号 |
KR20120103683 |
申请日期 |
2012.09.19 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIAO MIAO CHENG;LIANG JINN KWEI;HSIEH WEN CHIEH;JANGJIAN SHIU KO;KO HSIANG HSIANG;WANG YING LANG |
| 分类号 |
H01L27/146;H01L27/14 |
主分类号 |
H01L27/146 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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