发明名称 APPARATUS FOR CUTTING A WAFER
摘要 The present invention relates to a wafer cutting device. The present invention comprises a loading stage including a body part with a wafer mounting part in which a wafer is mounted and a first position setting part formed on the body part; a handling cap including a coupling part with a second position setting part setting a position by being coupled to the first position setting part and a guide body part connected to the coupling part and has the penetrated inside; and a cutter moving along the guide body part and cutting the wafer put on the wafer seating part of the loading stage. The present invention has a simple configuration, cheap production costs, and a small size so as to require less installation space. Further, according to the present invention, the wafer can be precisely cut in a predetermined size and be easily cut.
申请公布号 KR20140089987(A) 申请公布日期 2014.07.16
申请号 KR20130002150 申请日期 2013.01.08
申请人 KOREA POLYTECHNIC UNIVERSITY INDUSTRY ACADEMIC COOPERATION FOUNDATION;KIM, JIN WAN;EOM, DAE YOUNG;JEON, MIN HWAN;LEE, KYUNG JAE 发明人 KIM, JIN WAN;LEE, KYUNG JAE;EOM, DAE YOUNG;JEON, MIN HWAN
分类号 H01L21/301 主分类号 H01L21/301
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