| 摘要 |
<p>A circuit pattern inspection device disposes a plurality of extinction electrodes in close proximity or is adjacent to both sides of a feeding electrode of an inspection unit to form an electric field distribution in the direction opposite to the direction of the electric field generated by an inspection signal by applying an extinction signal of an AC to shift a phase to the inspection signal applied to a conductive pattern to be inspected; to selectively feed the conductive pattern to be inspected by shaving a lower part of the electric field distribution by the inspection signal and form a composite electric field distribution which is sharpened; and to perform properly the determination of a good or a defective conductor pattern from an obtained detection signal.</p> |
