发明名称
摘要 An organic light emitting diode (OLED) display and thin film transistor (TFT) manufacturing method thereof are disclosed. According to the present invention, poly-silicon layers for forming active areas of non-driving TFT (e.g. peripheral circuit TFT and switch TFT) and driving TFT used in the OLED display are respectively made by using standard laser crystallization method and non-laser crystallization method or low energy laser crystallization method. Therefore, the peripheral circuit TFT has excellent electrical performance such as high carrier mobility, while the OLED-driving TFT has good stability so that the resultant display can operate with improved luminance uniformity.
申请公布号 JP5553327(B2) 申请公布日期 2014.07.16
申请号 JP20080310170 申请日期 2008.12.04
申请人 发明人
分类号 H01L29/786;G02F1/1368;H01L21/336;H01L51/50 主分类号 H01L29/786
代理机构 代理人
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