发明名称 PROCESS FOR PRODUCTION OF SILICON CARBIDE MOLDED ARTICLE
摘要 A method of producing a silicon carbide molded item is provided. The method includes molding a curable silicone composition comprising a silicon carbide powder or a combination of a silicon carbide powder and a carbon powder into a desired shape, curing the molded curable silicone composition to yield a cured silicone molded item, and then thermally decomposing the cured silicone molded item under a non-oxidizing atmosphere. The method is capable of simply producing a high-purity silicon carbide molded item having a desired shape and dimensions.
申请公布号 EP2487144(A4) 申请公布日期 2014.07.16
申请号 EP20100822095 申请日期 2010.10.07
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 AOKI, YOSHITAKA
分类号 C04B35/571;C04B35/573;H01L21/22 主分类号 C04B35/571
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