Semiconductor device with through electrode and method of manufacturing the same

摘要

In a method of manufacturing a semiconductor device 50 having a through electrode 56 that connects an electrode pad 20 of a semiconductor element 14, which has a device forming layer 18 and the electrode pad 20 on one surface side, and a rewiring pattern 52 on other surface side of the semiconductor element 14, the device forming layer 18 and the electrode pad 20 are formed on an upper surface side of the semiconductor element 14, a first resist layer 62 is formed on surfaces of the electrode pad 20 and the device forming layer 18, an opening 64 is formed in the electrode pad 20 by the etching, and a through hole 54 is formed in the semiconductor element 14 by the etching in a position that is communicated with the opening 64. The device forming layer 18 is protected by the first resist layer 62, and also a flip-chip connection can be applied by providing the through electrode 56 to attain a downsizing.