| 摘要 |
<p>The invention relates to a method and a device (20) for three-dimensional measurement of an object (6) using a confocal microscopy method comprising a laser source (21) for generating an illumination beam (3), a focusing optics (4) for focusing the illumination beam (3) on at least one measuring point (5, 23) on a surface of the object (6) to be measured, a detector (10) for detecting an observation beam (9) reflected by the surface of the object (6), a confocal observation optics (7), which allows only the observation beam (9) that is focused on the surface of the object (6) to pass through to the detector (10). The laser source (21) comprises multiple coherent laser elements (22), the laser elements (22) simultaneously emitting illumination beams (3) that are focused on multiple measuring points (5, 23) on the surface of the object (6), so that the laser elements (22) are arranged to reduce the speckle effect in the 3D-image data generated by the measurement.</p> |
