Silicon oxycarbide, growth method of silicon oxycarbide layer, semiconductor device and manufacture method for semiconductor device

摘要

A method of manufacturing a semiconductor device includes the steps of: preparing an underlying structure having a silicon carbide layer covering a copper wiring, and growing silicon oxycarbide on the underlying structure by vapor deposition using, as source gas, tetramethylcyclotetrasiloxane, carbon dioxide gas and oxygen gas, a flow rate of said oxygen gas being at most 3% of a flow rate of the carbon dioxide gas. The surface of the silicon carbide layer of the underlying structure may be treated with a plasma of weak oxidizing gas which contains oxygen and has a molecular weight larger than that of O2 to bring the surface more hydrophilic. Film peel-off and cracks in the interlayer insulating layer decrease.

主权项

1. A method of manufacturing a semiconductor device comprising:
preparing an underlying structure including a semiconductor substrate, a copper wiring formed above the semiconductor substrate and a first silicon carbide layer covering said copper wiring; growing a first silicon oxycarbide layer on the underlying structure by vapor deposition using, as source gas, tetra methylcyclotetrasiloxane, carbon dioxide gas and oxygen gas, a first flow rate of the oxygen gas being at most 3% of a flow rate of the carbon dioxide gas; growing a second silicon oxycarbide layer on the first silicon oxycarbide layer by vapor deposition under a different condition from the condition of growing the first silicon oxycarbide layer; growing a third silicon oxycarbide layer above said second silicon oxycarbide layer by vapor deposition using, as source gas, tetra methylcyclotetrasiloxane, carbon dioxide gas and oxygen gas, a second flow rate of said oxygen gas being at most 3% of a flow rate of the carbon dioxide gas; growing a fourth silicon oxycarbide layer on the third silicon oxycarbide layer by vapor deposition under a different condition from the condition of growing the third silicon oxycarbide layer; forming a via hole in the first silicon oxycarbide layer and the second silicon oxycarbide layer; forming a trench, which is connected to the via hole, in the third silicon oxycarbide layer and the fourth silicon oxycarbide layer; and forming a conductive layer in the via hole and the trench.