| 摘要 |
PURPOSE: An apparatus and method for depositing an inorganic film, and a method for manufacturing organic light emitting display element using the same reduces the stress between the oxide thing film interfaces to reduce the occurrence of a crack between the interfaces, improving the quality and flexibility of the inorganic film. CONSTITUTION: A processing chamber (110) has a sealed reaction space. A supporting unit (130) is installed inside the processing chamber and supports a deposition target. A target member (140) comprises a target consisting of inorganic substances to be deposited on the deposition target. A gas supply means (150) injects a first process gas consisting of a reactive gas or a second process gas consisting of the mixing of a reactive gas and inactive gas into the reaction space of the processing chamber. A power supply unit (160) generates sputtering power and applies it to a backing plate (140a) according to the process control of a control means (180). |
